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型号：BTF-1700C-CVD
关键词：由1700℃管式炉、三路质量流量计系统以及国产高真空系统（有高、低真空系统可选）所组成；设备技术成熟、质量可靠，温场均匀，结构合理，气路选用液晶屏触摸界面，使得操作异常简单、方便；设备的各项技术参数，30段可编程温控系统更是一目了然,使整个实验的运行状态尽在您的掌控之中。
设备用途：主要用于真空或气氛烧结、基片镀膜等要求加热温度较高的实验环境。
Heating zone parameter 加热区参数 | |
Power supply 电源 | AC 208-240V Single Phase，50/60 Hz 交流208-240V单相，50/ 60hz Rated powe 5.2kw 额定功率 5.2kw |
Operating temperature 工作温度 | Maximum temperature:1650℃ 最高温度：1650℃ ontinuous working temperature: 1550℃ 持续工作温度：1550℃ Recommended heating speed: below 1400℃ ≤10℃/min, 1400℃ to 1600℃≤5℃/min 推荐升温速度：1400℃以下≤10℃/min，1400℃到1600℃≤5℃/min |
Temperature Controller 控温方式 | PID automatic control and auto-tune function 模糊PID控制和自整定调节 30 programmable segments for precise thermal processing 智能化30段可编程控制 Built-in protection for the over-heated and broken thermocouple 超温和断偶报警功能 |
Heating Zone 加热 | Heating Zone Length:300mm 加热区长度：300mm Constant Temperature Zone: 150mm 恒温区长度：150mm Temperature Accuracy: +/- 1℃. 控温精度：+/- 1℃ |
Furnace tube size 炉管尺寸 | Diameter 60/80*1000mm (pipe diameter optional) Ф60/80*1000mm（管径可选） |
Heating Elements 加热元件 | Silicon molybdenum rod 硅钼棒 |
Overall dimensions 外形尺寸 | 610x440x720mm |
Standard fittings 标准配件 | One high purity corundum tube, alumina tube blocked 2 pairs 高纯刚玉管1支，氧化铝管堵2对 Stainless steel flange 1 set, fluorine rubber sealing ring 2 sets 不锈钢法兰1套，氟胶密封圈2套 High temperature gloves 1 pair, crucible hook 1, small safety 1 高温手套1副，坩埚钩1支，小保险1个 |
Sealing system 密封系统 | Stainless steel sealing flanges at both ends (including precision needle valve, pointer vacuum pressure gauge and hose type pagoda nozzles), the ports can be expanded for actual use 炉管两端配有不锈钢密封法兰(包括精密针阀，指针式真空压力表和软管式宝塔嘴接头)，端口可按实际使用扩展 |
Gas path system parameters 气路系统参数 | |
Mass flowmeter reference range (N2) 质量流量计参考量程（N2) | 100sccm, 200sccm, 500sccm (range optional) 100sccm、200sccm、500sccm (量程可选) |
Degree of accuracy 准确度 | ±1.5% |
Linear 线性 | ±0.5～1.5% |
Repeated accuracy 重复精度 | ±0.2% |
Response time 响应时间 | ≤10sec |
Working pressure difference range 工作压差范围 | 0.1～0.5 MPa |
Maximum pressure 最大压力 | 3MPa |
Interface 接口 | Φ6,1/4'' |
Display 显示 | 4 digit display 4位数字显示 |
Operating ambient temperature 工作环境温度 | 5~45 high purity gas 5~45高纯气体 |
Inner and outer double cast stainless steel tube 内外双抛不锈钢管 | Φ6 |
Pressure vacuum gauge 压力真空表 | -0.1～0.15 MPa, 0.01 MPa/格 |
Stop off valve 截止阀 | Φ6 |
Connection header type 连接头类型 | Double sleeve stainless steel connector 双卡套不锈钢接头 |
Optional one ways, two ways, three ways, four ways, five ways and more mass flowmeters 可选配一路、两路、三路、四路、五路等以上质量流量计 | |
Low vacuum system parameters 低真空系统参数 | |
Pumping speed 抽速 | 10m³/h |
Limit vacuum degree 极限真空度 | 5*10-1pa |
Power source 电源 | 220v 50hz |
Power of motor 电机功率 | 0.4kw |
Inlet and exhaust connection port 进排气连接口 | KF25 |
Amount of oil 用油量 | 1.1L |
Speed of motor 电机转速 | 1440rpm |
Operating ambient temperature 工作环境温度 | 5-40℃ |
The noise 噪音 | ≤56db |
Resistance vacuum gauge parameters 电阻真空计参数 | |
Equipped with gauge pipe 配用规管 | Pirani gauge 电阻规 |
Range of measurement 测量范围 | 105～10-1 Pa |
Number of ways of measurement 测量路数 | 1路 |
Range of control 控制范围 | 5×103～5×10-1Pa |
Mode of control 控制方式 | Relay contact output, load capacity AC220V/3A (or DC28V/3A) non inductive load 继电器触点输出，负载能力 AC220V/3A (或DC28V/3A)无感负载 |
Power source 电源 | 90-260V/50Hz or 220V ± 10% 50Hz |
Power consumption 功耗 | 20W |
The bellows manual flapper valve is connected with the vacuum system 采用波纹管手动挡板阀与真空系统相连接 | |
High vacuum system parameters 高真空系统参数 | |
Relative air humidity 空气相对湿度 | ≤85% |
Operating voltage 工作电压 | AC220V±10% 50/60HZ |
Power 功率 | 1KW |
Overall limit vacuum degree of the system 系统整体极限真空度 | 10-5Pa |
Degree of experimental vacuum 实验真空度 | 10-3Pa |
Overall dimensions 外形尺寸 | 850×600×650mm |
Mechanical pump 机械泵 | |
Pumping rate 抽气速率 | 10m³/h |
Capacity of oil 容油量 | 1.1L |
Power of motor 电机功率 | 400W |
Ultimate pressure 极限压强 | 6×10-2Pa |
Molecular pump 分子泵 | |
Pumping rate 抽气速率 | 100L/S |
Ultimate pressure 极限压强 | 6×10-6Pa |
Start up time 启动时间 | ＜2min |
Rated speed of rotation 额定转速 | 4300 revolutions per minute 4300转/分 |
Mode of cooling 冷却方式 | When the ambient temperature is 5-32℃, it is air-cooled. At 5-40℃, water cools 环境温度5-32℃时，风冷；5-40℃时，水冷 |
Molecular pump controller 分子泵控制器 | |
Voltage 电压 | 220V±22V |
Start up current 启动电流 | ≤7A |
Frequency of input 输入频率 | 47HZ~63HZ |
Maximum output power 最大输出功率 | ≤150W |
Maximum acceleration voltage 最大加速电压 | ≤40V |
Time of acceleration 加速时间 | ≤3min |
Frequency (two-speed) 频率（双速） | High speed: 705HZ±10HZ 高速：705HZ±10HZ Low speed: 430HZ±5HZ 低速：430HZ±5HZ |
Composite vacuum gauge 复合真空计 | |
Number of ways of measurement 测量路数 | 2 channels (1 channels each for resistance gauge and ionization gauge) 2路（电阻规、电离规各1路） |
Mode of operation 工作模式 | Manual/Automatic 手动/自动 |
电阻单元参数（Resistance element parameter） | |
Type of regulation 规管型号 | Electric resistance gauge 电阻规 |
Range of measurement 测量范围 | 1.0×105Pa~1.0×10-1Pa |
Range of effectiveness 有效范围 | 2.5×103Pa~5.0×10-1Pa |
Range of control 控制范围 | 2.5×103Pa~5.0×10-1Pa |
电离单元参数（Ionization unit parameter） | |
Type of regulation 规管型号 | Electric resistance gauge 电离规 |
Range of measurement 可测范围 | 5.0Pa~1.0×10-5Pa |
Range of effectiveness 有效范围 | 1.0Pa~5.0×10-5Pa |
Range of control 控制范围 | 1.0Pa~5.0×10-5Pa |
Regulate degassing methods 规管除气方式 | Joule degassing 焦耳去气 |
其他参数（Other Parameters） | |
Number of control channels 控制路数 | 4路 |
Mode of control 控制方式 | Point or area control/power down memory 点动或区域控制/带掉电记忆 |
Precision of control 控制精度 | ±1% |
Time of sampling 采样时间 | 1s |
Power source 电源 | 220V±10% 50HZ |
Power consumption 功耗 | 50W |
Operating ambient temperature 使用环境温度 | 0℃~45℃ |
Humidity 湿度 | ≤85% |
Connecting pipes 连接管路 | It is made of stainless steel and electric polished 采用全不锈钢，电抛光制作 The welding leakage rate of the parts is better than 1.0×10-9Pa.m3/s 零件焊接漏率优于1.0×10-9Pa.m3/s The bellows manual flapper valve is connected with the vacuum system 采用波纹管手动挡板阀与真空系统相连接 |
Note: Low vacuum or high vacuum system can be selected according to technological requirements 备注：可根据工艺要求选配低真空或高真空系统 | |
